Aim\ To introduce the development and policy of Micro Electronic Mechanical System (MEMS) and Micro Inertial Measurement System
to discuss the application technology of Micro Inertial Measurement System. Methods\ Exploring the strategy of developed countries
such as the Unite States
Japan
Europian countries
and the countermeasure of China. For application
system optimization
ASIC production and high overloading proof technique are adopted. Results and Conclusion\ Modularization integration technology can meet some application requirements and has been used in practice. Micro Inertial Measurement System is one of the key parts of Micro Electronic Mechanical Systems needed to research in the future.