Applications of External-Cavity Semiconductor Laser in Microvibration Measurement

江鹏飞; 谢福增

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Applications of External-Cavity Semiconductor Laser in Microvibration Measurement

更新时间：2026-09-14

- Applications of External-Cavity Semiconductor Laser in Microvibration Measurement
- 外腔半导体激光器在微振动测量中的应用
- Issue 1, Pages: 46-48(2007)
- 作者机构：
  
  中国科学院半导体研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：2007
- 稿件说明：
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江鹏飞, 谢福增. Applications of External-Cavity Semiconductor Laser in Microvibration Measurement[J]. 2007, (1): 46-48.
DOI：

江鹏飞, 谢福增. Applications of External-Cavity Semiconductor Laser in Microvibration Measurement[J]. 2007, (1): 46-48. DOI：

摘要

基于外腔半导体激光器(ECSL)良好的相干特性

采用Littrow自准直外腔方式进行了实验

得到了良好的线宽和稳定的功率

验证了外腔半导体激光器运用于纳米级光学测量和微振动测量的可行性;提出了解决外界扰动的反馈光路方案

能够有效滤除环境振动和噪声干扰

提高了振动测量系统在现实环境中的适应能力.

Abstract

Based on excellent coherence of the External-Cavity Semiconductor Laser(ECSL)

the experiment of favorable spectral line width and steady power were got by using autocollimation external-cavity of Littrow.It is proved that ECSL can be used in the measurement of nanometrology and microvibration.A method of feedback light-path to remove the environment vibratility and noise interference was presented

which can improve the adaptability of the measurement system in the environment.

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references

程晓辉,赵洋,李达成.光学纳米测量方法及发展趋势[J].光学技术,1999,26(3):73-77.Cheng Xiaohui,Zhao Yang,Li Dacheng.Review on optical nanometrology[J].Optical Technique,1999,26(3):73-77.(in Chinese)

Rodrigo P J,May Lim,Caesar Saloma.Optical-feedback semiconductor laser Michelson interferometer for displace-ment measurements with directional discrimination[J].Appl.Opt.,2001,40(4):506-513.

赵伟瑞,曹根瑞.斩波式自适应移相干涉技术[J].光学学报,2002,22(7):858-862.Zhao Weirui,Cao Genrui.Chopping adaptive phase-shifting interferometry[J].Acta Optica Sinica,2002,22(7):858-862.(in Chinese)

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