Design and Simulation of Bimetallic Thermal Actuation

刘丽双

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Design and Simulation of Bimetallic Thermal Actuation

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- Design and Simulation of Bimetallic Thermal Actuation
- 双金属热致动器的设计与仿真
- Vol. 29, Issue 6, Pages: 554-557(2008)
- 作者机构：
  
  中北大学仪器科学与动态测试教育部重点实验室
- 作者简介：
- 基金信息：
- DOI：
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- Published：2008
- 稿件说明：
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刘丽双. Design and Simulation of Bimetallic Thermal Actuation[J]. 2008, 29(6): 554-557.
DOI：

刘丽双. Design and Simulation of Bimetallic Thermal Actuation[J]. 2008, 29(6): 554-557. DOI：

摘要

双金属热致动器通过加热使得驱动元件本身的温度升高

结构内部产生热应力

导致薄膜产生线性应变

从而达到驱动目的.分析了双金属热致动原理

经过理论建模与matlab软件仿真

给出了双金属片的形变位移与悬臂梁长度、结构厚度、两种材料热膨胀系数差、温度变化量以及材料弹性模量与悬臂梁宽度的具体关系

根据仿真结果

后两者的变化对其形变大小影响不大.所得结论为双金属热致动器的设计提供了详细的理论依据.

Abstract

Duplex metal thermal actuator raises the temperature of its driving structure by heating

and the film generates linearity strain due to the thermal stress of the structure

and then the structure is driven.The principle of the duplex metal actuator is presented.After simulated by Matlab and theoretically modeled

it indicates the relation between the deforming of duplex metal and some factors including the length of cantilever

the thickness of the structure

the difference of CTE between two materials

the change of temperature and the width of cantilever.The simulation result shows that the effect of the last two factors is little

which provides detailed theory to the design of duplex metal actuator.

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references

苏淑靖,杨晓敏,张文栋.双晶片垫致动微型镜的结构设计[J].测试技术学报,2002,16(Z2):45-47.Su Shujing,Yang Xiaomin,Zhang Wendong.The design of two-kind wafer micro-mirror actuated by heat[J].Journal of Test and Measurement Technology,2002,16(Z2):45-47.(in Chinese)

杨岳,周兆英,叶雄英.微型热致动器研究[J].半导体技术,2000,25(1):14-18.Yang Yue,Zhou Zhaoying,Ye Xiongying.Research on themally actuated microactuators[J].SemiconductorTechnologh,2000,25(1):14-18.(in Chinese)

Riethmǜller W,Benecke W.Thermally excited silicon microactuators[J].IEEE Transactions of Electron Devices,1988,35(6):758-763.

王复兴,王书贵.材料力学教程[M].北京:中国轻工业出版社,1995.

王勖成,邵敏.有限单元法基本原理和数值方法[M].北京:清华大学出版社,1998.

Werner R,Wolfgang B.Thermally excited silicon microactuators[J].IEEE transaction on electron devices,1988,35(6):758-763.

楼顺天.MATLAB程序设计语言[M].西安:西安电子科技大学出版社,1997.

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