Analysis of Tunneling Current Effect of A High-accuracy and Low-range Tunneling Gyroscope

刘俊; 张琼; 石云波; 刘晓鹏; 朱政强

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Analysis of Tunneling Current Effect of A High-accuracy and Low-range Tunneling Gyroscope

更新时间：2026-09-14

- Analysis of Tunneling Current Effect of A High-accuracy and Low-range Tunneling Gyroscope
- 一种高精度低量程隧道陀螺仪的隧道电流效应分析
- Vol. 30, Issue 2, Pages: 175-178(2009)
- 作者机构：
  
  1. 中北大学电子测试技术国家重点实验室
  2. 仪器科学与动态测试教育部重点实验室
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：2009
- 稿件说明：
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刘俊, 张琼, 石云波, et al. Analysis of Tunneling Current Effect of A High-accuracy and Low-range Tunneling Gyroscope[J]. 2009, 30(2): 175-178.
DOI：

刘俊, 张琼, 石云波, et al. Analysis of Tunneling Current Effect of A High-accuracy and Low-range Tunneling Gyroscope[J]. 2009, 30(2): 175-178. DOI：

摘要

针对微卫星所用高灵敏、低量程陀螺的需求

提出了一种高精度低量程隧道式陀螺仪的新结构

对隧道陀螺的基本组成部件进行了详细的分析

并介绍了其工作原理.设计了隧道陀螺仪的隧道电流测试方案

采用HP 4156C高精度半导体参数测试仪对传感器的隧道电流效应进行了测试

并对隧道电流效应进行了理论分析

在此理论分析的基础上对测试数据进行了归纳与分析

得到器件势垒高度的值分别为0.518 eV

0.555 eV.验证结果表明:本结构隧道电流效应明显

器件有较高的灵敏度.

Abstract

Due to the demand of high-accuracy and low-range gyroscope used in micro-satellite

a new structure of tunneling gyroscope with high-accuracy and low-range was presented

as well as the mechanics and the operating principles of the gyroscope were analyzed.The tunneling current effect of the structure was tested by HP4156C high precise semiconductor parameter test instrument

and analyzed in theory.The test result indicates that the values of barrier height of the device are 0.518 eV and 0.555 eV.It verifies the tunneling effect and high-accuracy of the structure.

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references

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