Research on Sensitive Electrode in Novel Capacitive Accelerometer

刘双峰; 马铁华; 甘潦; 徐晟

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Research on Sensitive Electrode in Novel Capacitive Accelerometer

更新时间：2026-09-14

- Research on Sensitive Electrode in Novel Capacitive Accelerometer
- 一种新型电容式加速度传感器敏感电极的研究
- Vol. 32, Issue 2, Pages: 218-221(2011)
- 作者机构：
  
  1. 中北大学仪器科学与动态测试教育部重点实验室
  2. 中国人民解放军驻061基地军事代表室
  3. 中北大学经济与管理学院
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：2011
- 稿件说明：
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刘双峰, 马铁华, 甘潦, et al. Research on Sensitive Electrode in Novel Capacitive Accelerometer[J]. 2011, 32(2): 218-221.
DOI：

刘双峰, 马铁华, 甘潦, et al. Research on Sensitive Electrode in Novel Capacitive Accelerometer[J]. 2011, 32(2): 218-221. DOI：

摘要

针对现有加速度传感器在测试时相对于高冲击后可能导致丧失高灵敏度的性能

提出了一种新型电容式加速度传感器.该传感器利用水银作为液体敏感电极代替传统的固体敏感电极

结构简单.实验证明:该传感器性能良好

线性度为6.52%

灵敏度为0.501 p f/g

重复性为1.45%

可广泛应用于抗高过载低量程方面的加速度测试.

Abstract

For the existing accelerometers may lose their high sensitive performance when suffers high shock

a novel capacitive accelerometer was proposed.Traditionally used solid sensitive electrode was replaced by mercury one

which was liquid state and simply structured.The experimental results showed high resolution of the accelerometer

with the linearity of 6.52%

sensitivity of 0.501 pf/g

and repeatability of 1.45%.It could be used in the acceleration measurement of low range under circumstances of high overload.

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references

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