Study on Closed-Loop System of a Capacitive Micro-Accelerometer

陈伟平; 陈晓亮; 郭玉刚; 刘晓为

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Study on Closed-Loop System of a Capacitive Micro-Accelerometer

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- Study on Closed-Loop System of a Capacitive Micro-Accelerometer
- 一种电容式闭环微加速度计系统研究
- Vol. 32, Issue 4, Pages: 502-506(2011)
- 作者机构：
  
  哈尔滨工业大学MEMS中心
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：2011
- 稿件说明：
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陈伟平, 陈晓亮, 郭玉刚, et al. Study on Closed-Loop System of a Capacitive Micro-Accelerometer[J]. 2011, 32(4): 502-506.
DOI：

陈伟平, 陈晓亮, 郭玉刚, et al. Study on Closed-Loop System of a Capacitive Micro-Accelerometer[J]. 2011, 32(4): 502-506. DOI：

摘要

基于SOG(Silicon on Glass)工艺设计了一种新型电容式加速度传感器结构

分析了该结构的检测和反馈原理.为了提高闭环微加速度传感器的性能

更好地实现闭环控制调节作用

对传感器系统进行了研究.在反馈系统中引入PID控制器

并建立了SIMLINK系统模型

分析了系统闭环传递函数以及控制参数对传感器系统的影响.仿真结果表明:PID控制器可以很好地改善系统的频率响应

增加系统带宽

调节系统的阻尼

减小系统的响应时间和调节时间

大大提高了闭环加速度计的性能.

Abstract

A closed-loop accelerometer based upon SOG(Silicon on Glass) technology

and its capacitive sensing element were described.Sensing and feedback principle were analyzed.In order to improve the performance of the micro-accelerometer and obtain a good control of the system

a SIMULINK model was established and the closed-loop transfer function was analyzed.In feedback system

a PID controller was used.The effects of the controller parameters were simulated

and the simulated results show that the PID controller can improve the frequency response

broad the bandwidth

optimize the damping

and decrease the response time and rise time.

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Keywords

references

陈渝,郁发新,王慧泉,等.电容式力平衡加速度计的设计[J].传感技术学报,2006,19(2):411-412.Chen Yu,Yu Faxin,Wang Huiquan,et al.Design of force-balance capacitive accelerometer[J].Chinese Journal ofSensors and Actuators,2006,19(2):411-412.(in Chinese)

Navid Yazdi,Khalil Najafi.An all-silicon single-wafer micro-g accelerometer with a combined surface and bulkmicromachining process[J].Journal of Micro Electromechanical Systems,2000,9(4):544-550.

Boser B E,Howe R T.Surface micro-machined accelerometers[J].Journal of Solid-State Circuits,1996,31(3):366-373.

Lee I,Yoon G H.Development and analysis of the vertical capacitive accelerometer[J].Sensors and Actuators A,2005,119:8-18.

Kraft M,Lewis C P.Design of a hybrid closed loop control system for a MEMS accelerometer using back-steppingprinciple[C].Microelectronics.ICM 2007.International Conference,2007:213-216.

Kraft M,Lewis C P,Hesketh T G.Closed-loop silicon accelerometers[J].IEEE Proc-Circuits Syst.,1998,146(5):325.

陈伟平,赵振刚,刘晓为,等.力平衡框架结构加速度计的设计[J].传感技术学报,2006,19(5):2193-2195.Chen Weiping,Zhao Zhengang,Liu Xiaowei,et al.Design of force-balance accelerometer with frame structure[J].Chinese Journal of Sensors and Actuators,2006,19(5):2193-2195.(in Chinese)

Park K M.Methodologies for MEMS device performance and damage monitoring[D].Hoboken:Stevens institute oftechnology,2002.

Aaltonen L,Rahikkala P.Continuous time interface for±1.5 g closed-loop accelerometer[C].Integrated CircuitDesign and Technology.ICICDT’07 IEEE International Conference,2007:1-4.

富兰克林著.动态系统的反馈控制[M].第4版.朱齐丹,张丽珂译.北京:电子工业出版社,2004.

Kuo B C,Golnaraghi F.自动控制系统[M].汪小帆,李翔译.北京:高等教育出版社,2004.

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