混合集成电容式加速度传感器的设计

马喜宏; 刘俊; 郭虎刚

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混合集成电容式加速度传感器的设计

更新时间：2026-09-14

- 混合集成电容式加速度传感器的设计
- 混合集成电容式加速度传感器的设计
- Issue 5, (2010)
- 作者机构：
  
  中北大学电子测试技术国家重点实验室
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：2010
- 稿件说明：
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马喜宏, 刘俊, 郭虎刚. 混合集成电容式加速度传感器的设计[J]. 2010, (5).
DOI：

马喜宏, 刘俊, 郭虎刚. 混合集成电容式加速度传感器的设计[J]. 2010, (5). DOI：

摘要

详细分析了一种电容式加速度传感器的工作原理

设计了基于这种电容式检测原理的加速度传感器.该传感器能将线加速度产生的惯性力转换成弹性变形

通过转换电路转换为可测量的电学量.通过厚膜工艺技术实现了电容式敏感元件与信号调理电路混合集成设计

这种集成系统被加工制备并封装形成一个完整的电容式加速度测量系统

该系统具有小型化和高集成度的优点.文中详细阐述了厚膜电路的加工工艺方法

并对设计的传感器进行了实验测试和数据分析.实验测试表明:集成后的加速度传感器具有较好的线性度和高的灵敏度.

Abstract

The operating principle of a capacitive acceleration sensor is analyzed in detail.Based on the principle

we design a capacitive acceleration sensor which can convert the inertia force for linear acceleration to the distortion of elasticity.The distortion is measured through a strain meter and a detection circuit.The schematic diagram of signal conditioning circuit is analyzed.The capacitive sensing element and signal conditioning circuit are realized by the thick film process technology

which is further fabricated and formed a capacitive acceleration measurement system.The system has advantages of mini-type and high integration.The fabrication process of the thick-film circuit is expatiated in detail.Experiment results show that the integrated acceleration sensor has good linearity and high sensibility.

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