Quality factor is an important criterion for judging the quality of microstructure

particularly for that of the microstructure in vacuum encapsulation.The quality factor of microstructure being vacuum encapsulated varies from hundreds to thousands;testing the quality factor of vacuum encapsulation micromechanical gyroscopes is of great importance.In this paper

the basic principle for testing the quality factor of micromechanical gyroscopes has been presented in details;specific approaches for testing the quality factor of micromechanical gyroscopes

including electrostatic exciting;capacitive detecting and mechanical exciting;capacitive detecting

have also been presented.