A MEMS flow sensor was integrated with a PZT pump to form a closed-loop drug delivery system.Benefiting from the feedback of sensor information

the system could self-adjust the driving voltage of the PZT pump to accurately control the desired drug volume without pre-calibration.First

the structure and principle of the PZT pump were introduced briefly.Secondly

the MEMS flow sensor was presented.Thirdly

the fuzzy PID closed-loop control strategy was proposed to calculate and adjust the driving voltage in real-time.Finally

experiments with fuzzy PID closed-loop control method were carried out

and experiment results show that the drug delivery system can accurately delivery drug volume with the error smaller than 0.1 μL when the desired volume is 100 μL.It indicates that the pump dosing system has high reproducibility and accuracy.